Best scanning configuration
ScanningLibra 686
MPEe0.6+L/500 µmMPEp0.8 µm
Fixed-Bridge Ultra-High-Precision CMM
Libra Fixed-Bridge Ultra-High-Precision CMM
Ultra-precision fixed-bridge CMM for controlled metrology rooms, precision components, molds, and high-stability measurement.
PositioningUltra-precision fixed-bridge CMM
Work volume
X600–1200 mm
Y800–1600 mm
Z600–1000 mm
Axis combinations vary by model.Load300–600 kg
Best accuracy
Scanning
MPEe0.6+L/500 µmMPEp0.8 µm
Best Available Accuracy
Libra Configuration Reference
Accuracy varies by model size, probe configuration, and acceptance conditions.
Model Range
Libra Travel and Accuracy Options
Swipe left or right to see all specifications. Keyboard: focus the table and use the arrow keys.
| Model | Range | Dimension | Machine weight | Max speed | Max acceleration | Load | Scanning MPEe | Scanning MPEp | MPEThp/t | Touch-trigger MPEe | Touch-trigger MPEp |
|---|---|---|---|---|---|---|---|---|---|---|---|
| Libra 686 | 600×800×600 mm | 1550×2220×3200 mm | 4500 kg | 400 mm/s | 700 mm/s² | 300 kg | 0.6+L/500 µm | 0.8 µm | 1.5/90 | — | — |
| Libra 8106 | 800×1000×600 mm | 1750×2420×3200 mm | 5500 kg | 400 mm/s | 700 mm/s² | 450 kg | 0.8+L/500 µm | 1 µm | 1.8/90 | — | — |
| Libra 10128 | 1000×1200×800 mm | 2250×3700×3750 mm | 7500 kg | 400 mm/s | 700 mm/s² | 600 kg | 1.0+L/500 µm | 1.2 µm | 2.0/90 | — | — |
| Libra 12167 | 1200×1600×700 mm | 3646×2222×3512 mm | 9500 kg | 400 mm/s | 700 mm/s² | 600 kg | 1.1+L/500 µm | 1.3 µm | 2.0/90 | — | — |
| Libra 121510 | 1200×1500×1000 mm | 2134×3470×4051 mm | 9250 kg | 400 mm/s | 700 mm/s² | 600 kg | 1.2+L/500 µm | 1.4 µm | 2.0/90 | — | — |
Best-Fit Applications
Where Libra Fits Best
Libra is intended for controlled metrology rooms where high rigidity, thermal stability, and low measurement uncertainty are more important than maximum travel size.
Controlled metrology rooms
Use Libra in controlled metrology rooms where stability and low measurement uncertainty matter most.
Precision components
A fit for high-precision work where a fixed-bridge structure is more important than maximum travel size.
High-stability measurement
Not intended for uncontrolled shop-floor environments or large parts that require gantry travel.
Precision Linear-Motion Base Inspection
- TRAVEL
- 1200 × 1600 × 700 mm
- STRUCTURE
- Fixed-bridge CMM
- PART
- Linear-motion base
- ACCURACY
- MPEe 1.1 + L/500 µm
1Customer Scenario
Inspection of alignment-critical machined bases for automation, optical systems, semiconductor tooling or precision stages.
2Why This Machine
Fixed-bridge rigidity and measurement stability for applications focused on repeatability, straightness, flatness and alignment.
3System Configuration
High-accuracy fixed-bridge platform with contact scanning setup for guide rail surfaces, long profiles and precision datums.
4Measurement Problem Solved
Flatness, straightness, parallelism, rail mounting surfaces, precision hole patterns and alignment datums across the machined base.
Similar applications
Semiconductor equipment parts, optical equipment frames, precision motion bases, gauges and metrology-room inspection.
Structure & motion
Engineering Highlights
Libra Structure and Motion Package
Libra uses a fixed-bridge architecture and high-stability measurement stack for ultra-high-precision applications in controlled environments.
Fixed-Bridge Structure
Emphasizes high rigidity and long-term stability for high-accuracy measurement.
Closed Air Bearing Layout
Designed to reduce Abbe error and improve precision during high-speed movement.
Floating Glass Scales
Provide dimensional measurement reference and reduce guideway thermal expansion influence.
Precision Isolation Options
Precision vibration isolators can be selected according to model and load requirements.
Environment & site requirements
Site Requirements
Confirm Environment Before Quotation
PeakMerit reviews installation conditions, model-specific load capacity, air, power, and acceptance needs before final quotation.
Load capacity
Model-specific. See model table. Family range: 300–600 kg.
Temperature
20 ± 1°C
Thermal stability
≤1°C/h; ≤2°C/24 h; spatial gradient ≤1°C/m
Humidity
55–65%
Voltage / Current
AC 220 V ±10%; 15 A
Air Supply
0.6–0.8 MPa; >230 NL/min
Controller, probe & software options
Configured System Options
Controller, Probe, and Application Package
Select the machine family together with the controller, probe head, rack, joystick, software workflow, and acceptance requirements that fit the application.
SC30 scanning package
For ultra-high-precision controlled-room applications where scanning is required and compatible.
View SC30 Scanning ProbesAsk before quoting
- Acceptance condition
- Scanning features
- Controlled-room stability
Motorized probe head package
For repeatable probe orientation in controlled metrology workflows.
View CZ10T-S Probe HeadAsk before quoting
- Probe orientations
- Thermal condition
- Repeatability target
Vibration isolation / acceptance planning
For projects where thermal stability, vibration, and acceptance condition must be reviewed before quotation.
Ask before quoting
- Temperature control
- Vibration condition
- Acceptance artifact
Controller and software workflow review
For high-stability measurement projects that require a tightly planned measurement stack.
View MACC ControllersAsk before quoting
- Software workflow
- Controller path
- Calibration and compensation
Selection Boundaries
Not Ideal For
- Uncontrolled shop-floor environments
- Very large parts that require gantry travel
- General QC applications where Polaris or Gemini provides sufficient capability
- Budget-sensitive first CMM projects
Nearby Choices
Compare With Nearby Models
Gemini
Gemini if a high-precision bridge CMM is sufficient.
View GeminiTaurus
Taurus if part size is the main constraint.
View TaurusPolaris
Polaris if the project is general manufacturing QC rather than ultra-high precision.
View PolarisCONTINUE YOUR REVIEW
Explore related resources and next steps.
Compare CMM families
Check other platforms before settling on travel and configuration.
Understand CMM accuracy
Read the specification terms alongside the model and operating conditions.
Touch-trigger or scanning?
Choose the measurement method around features and inspection needs.
See project updates
Explore published CMM setups and field activity.
Ready to Configure This CMM?
Send your part size, tolerance requirement, inspection environment, and preferred probing method. PeakMerit will recommend a suitable model and configuration for quotation.